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Measurement of rough surface topography using coherence scanning interferometry GPG116

The purpose of this guide is to describe good practice for the measurement and characterisation of rough surface topography using coherence scanning interferometry (commonly referred to as vertical scanning white light interferometry).

The purpose of this guide is to describe good practice for the measurement and
characterisation of rough surface topography using coherence scanning interferometry
(commonly referred to as vertical scanning white light interferometry).


15 Dec 2010
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