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Calibration of the metrological characteristics of ICMs GPG128

This is a guide to the calibration of Imaging Confocal Microscope (ICM). Methods for determining the measurement noise, flatness deviation, amplification coefficient, linearity and perpendicularity of the axes and resolution of areal surface topography measuring instruments are presented.

This is a guide to the calibration of Imaging Confocal Microscope (ICM). Methods
for determining the measurement noise, flatness deviation, amplification coefficient, linearity
and perpendicularity of the axes and resolution of areal surface topography measuring
instruments are presented.


28 Nov 2013
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