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Good practice guides

Calibration of the metrological characteristics of CSI & PDI GPG127

This document is a guide to the calibration of Coherence Scanning Interferometers (CSI) and
Phase Shifting Interferometers (PSI). Methods for determining the measurement noise,
flatness deviation, amplification coefficient, linearity and perpendicularity of the axes and
resolution of areal surface topography measuring instruments are presented.


28 Nov 2013
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