National Physical Laboratory

The measurement of rough surface topography using coherence scanning interferometry.

Author(s):

Petzing, J*, Coupland, J*, Leach, R K

Source:
Measurement Good Practice Guide No. 116, December 2010
ISSN:
1368-6550
ISBN:
NPL Doc. Ref:
PDB: 5659 | DDB: 3209
Document Type:
Guide
DOI:

Note: An asterisk after an author's name indicates a non-NPL author.

Abstract:

This guide describes good practice for the measurement and characterisation of rough surface topography using coherence scanning interferometry (commonly referred to as vertical scanning white light interferometry). It is aimed at users of coherence scanning interferometry for the optical measurement of surface texture within production and research environments. The general guidelines described herein can be applied to the measurement of rough surfaces exhibiting different types of surface topography. For the purpose of this guide, the definition of a rough surface is one that has features with heights ranging from approximately 10 nm to less than 100 µm

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