National Physical Laboratory

Vocabulary of ~800 terms for Surface Chemical Analysis - ISO

The surface chemical analysis vocabulary provides the definitions for some 800 surface chemical analysis terms in the two ISO International Standards:

  1. ISO18115-1:2010 - Surface chemical analysis - Vocabulary - Part 1, General terms and terms used in spectroscopy
  2. ISO18115-2:2010 - Surface chemical analysis - Vocabulary - Part 2, Terms used in scanning-probe microscopy

These documents, available from ISO (International Standards Organization in Geneva) or your National Standards Body, cover the terms used in surface analysis spectroscopies such as Auger electron spectroscopy (AES), secondary ion mass spectrometry (SIMS), X-ray photoelectron spectroscopy (XPS) and many similar methods as well as in the scanned probe microscopies (SPM) such as atomic force microscopy (AFM), scanning near-field optical microscopy (SNOM), scanning tunnelling microscopy (STM) and many similar methods.

Because it is important for analysts, researchers and students to communicate clearly and unambiguously, these definitions are now freely available from ISO using the links to ISO18115-1* and ISO18115-2* as PDFs with their indexes at the ISO portal. The Vocabularies are structured and it is easiest to find particular terms, or groups of terms, using the indexes from the PDFs at the ISO portal in which the term number is given. These indexes are given in the English PDF versions at the back as follows:

In 18115-1, the index for terms in Part 1 is at pages 92-99, while the index for terms in Part 2 is at pages 100-103.

In 18115-2, the index for terms in Part 2 is at pages 38-41, while the index for terms in Part 1 is at pages 42-49.

The definitions are also available on the Online Browsing Platform at ISO18115-1* and ISO18115-2*. These links take you to a specific part of the ISO Online Browsing Platform, please wait for about a minute while they load. The general ISO Online Browsing Platform is useful for searching for terms not included in the above standards but that may have been defined in other relevant standards covering the wider spheres of chemistry, optics, etc. It provides all definitions for any given term in ISO standards (click 'Terms & Definitions' button) from the different fields so that they may be compared.

To help users of scanned probes, we also provide a family tree of the SPM acronyms, and annotated figures of the design of complex probes and of the probe assembly (Adobe Acrobat PDF file PDF 340 KB).

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Copyright protected document

© ISO 2010. The reproduction of the terms and definitions contained in these International Standards is permitted in teaching manuals, instruction booklets, technical publications and journals for strictly educational or implementation purposes. The conditions for such reproduction are: that no modifications are made to the terms and definitions; that such reproduction is not permitted for dictionaries or similar publications offered for sale; and that the International Standard is referenced as the source document.

With the sole exceptions noted above, no other part of the documents may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either ISO at the address below or ISO's member body in the country of the requester.

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Revision history of ISO 18115 - Surface chemical analysis - Vocabulary

The initial vocabulary, ISO18115:2001, contained 350 terms for Surface Chemical Analysis covering AES, XPS, SIMS, sputtering, depth profiling and associated areas. In the first amendment, ISO 18115:2001Amd 1 in 2006, 5 abbreviations and 71 terms were added, many covering concepts in glow discharge analysis. The second amendment, ISO 18115:2001Amd 2 in 2007, contained a further 87 terms for secondary ion mass spectrometry, elastic peak electron spectroscopy and reflected electron energy loss spectroscopy, 76 acronyms for scanned probes, 33 definitions of scanned probe techniques, 6 terms for contact mechanics and 147 terms for concepts in scanned probe analysis. Additionally, term 5.24, attenuation length, in ISO 18115:2001 had an added sentence clarifying NOTE 2 and term 5.25, effective attenuation length, is revised to make it more general. To accommodate further new terms and a few clarifications, in 2010, this standard was revised into the two new ISO documents; Parts 1 and 2, where Part 1 contains entries relevant to the spectroscopies and Part 2 to the scanned probes. Amendments to these new documents, containing over 100 further terms were approved in 2013.

Last Updated: 3 Apr 2013
Created: 28 Mar 2013