The NPL Metrological Atomic Force
Microscope (MAFM)
Array of pillars forming
part of a lateral (x-y)
1 micrometre pitch
calibration standard
5 micrometre step
height standard

Measurement service for Atomic Force Microscopy.

Overview

NPL provides a measurement service for traceable calibration of artefacts that can be used to calibrate atomic force microscopes. Both pitch and height standards can be calibrated. This measurement service is based on a Metrological Atomic Force Microscope (MAFM), developed at NPL.

Products & Services

Key features of the MAFM are:

• laser interferometers to provide traceable measurement of displacement in all three axes
• a measurement range in x and y of 100 micrometres

Typical uncertainties

For calibration of pitches in the range 300 nm to 10 µm are:

• for a 300 nm pitch: ± 0.2 nm
• for a 10 µm pitch: ± 2 nm

For step height standards for calibration of z axis scale, nominal step heights 10 nm to 2.5 µm, typical uncertainties:

• for a 10 nm step: ± 0.4 nm
• for a 2.5 µm step: ± 15 nm

Publications

• Haycocks J & Jackson K (2005) Traceable calibration of transfer standards for scanning probe microscopy Prec. Eng. 29 168-175J.
• Haycocks J, Jackson K (2005) Traceable calibration of transfer standards for scanning probe microscopy Precision Engineering 29 168–175.
• Leach, R K, Haycocks, J, Jackson, K, Lewis, A, Oldfield, S, Yacoot, A  Advances in traceable nanometrology at the National Physical Laboratory. Nanotechnology, 2001, 12, R1-R6.
• Yacoot A & Koenders L (2008) Aspects of scanning force microscope cantilevers and tips and their effects on dimensional measurement J. Phys. D: Appl. Phys. 41 (2008) 103001.
• Bakucz P, Yacoot A, Dzombia T, Koenders L & Krüger-Sehm R (2008) Neural network approximation of tip-abrasion effects in AFM-imaging Meas. Sci. Technol. 19 (2008) 065101.

Contact

Customer Service tel: +44 20 8943 8631
E-mail: dimensional_enquiries@npl.co.uk