Performance verification of a dual sensor stage
The current trend for nanopositioning with increased speed has led to the development by Queensgate of a dual sensor system for servo control of single axis displacement stages.
The stage and control system is currently being evaluated using optical interferometry developed at the National Physical Laboratory.
Preliminary results show the performance of the optical interferometer and the stage.
Download (PDF 1 MB)
Please note that the information will not be divulged to third parties, or used without your permission