National Physical Laboratory

Performance verification of a dual sensor stage

The current trend for nanopositioning with increased speed has led to the development by Queensgate of a dual sensor system for servo control of single axis displacement stages.

The stage and control system is currently being evaluated using optical interferometry developed at the National Physical Laboratory.

Preliminary results show the performance of the optical interferometer and the stage.

Further Information

Published: 02 June 2014

Authors: A.Yacoot, J. Mountford, M. Tedaldi, B. Reid, S. Levy

Download   (PDF 1 MB)

Last Updated: 14 Jul 2014
Created: 7 Apr 2014


Please note that the information will not be divulged to third parties, or used without your permission