Organic multilayer reference materials for depth profiling
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Published: 23 July 2013
Authors: S. J. Spencer, A. G. Shard and S. A. Smith
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Understanding the depth distribution of organic species is of greatimportance for the manufacture of a number of innovative devicessuch as organic electronics, medical devices and polymeric flms.
Few analytical methods can measure these depth distributions to therequired levels of accuracy and sensitivity, however in recent yearsit has become possible using cluster ion beam sputtering combinedwith X-ray photoelectron spectroscopy (XPS) and secondary ion massspectrometry (SIMS).
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