NPL Auriga FIB-SEM
Download (PDF 427 KB)
The NPL Zeiss Auriga 60 focused ion beam scanning electron microscope (FIB-SEM) is a major facility for 3D microstructural characterisation of materials.
It is yielding new information, with nanometre resolution, on materials' structure, composition and crystallography, and on damage to their structures that can be caused during their manufacture and use. It also has full fabrication facilities.