National Physical Laboratory

Advanced Optical Techniques for the Measurement of the Internal Geometry of MEMS structures

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Published: 30 September 2010

Authors: Wenjuan Sun, Richard Leach

Related: Engineering Measurement


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Microelectromechanical systems (MEMS) are becoming more advanced and consist of many different layers.

This poster explains the testing techniques used to measure the internal structures of MEMS, which can be difficult to characterise. Non-contact and non-invasive techniques (Optical Coherence Tomography and Infra-red Confocal Microscopy) were used to assess the thickness of different layers in an example MEMS pressure sensor.

Last Updated: 18 Jan 2016
Created: 10 Feb 2011

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