Novel focused ion beam-milled probes for combined scanning electrochemical microscopy - atomic force microscopy.
- Author(s):
- Wain, A J, Zhou, S, Cox, D, Turnbull, A
- Source:
- NPL Report MAT 48, July 2010
- ISSN:
- 1754-2979
- ISBN:
- NPL Doc. Ref:
- PDB: 5590 | DDB: 3804
- Document Type:
- NPL Report
- DOI:
Note: An asterisk after an author's name indicates a non-NPL author.
Abstract:
A novel approach to the fabrication of dual function probes for combined scanning electrochemical microscopy - atomic force microscopy (SECM-AFM) is described. Silicon nitride AFM probes were machined using a focused ion beam (FIB) procedure to produce a 100 nm aperture through the apex of the tip. Subsequent filling of the aperture with platinum using beam-assisted metal deposition yielded a platinum nano-electrode at the tip apex. Insulation of the reverse side of the cantilever was achieved using beam-assisted tetraethyl orthosilicate (TEOS) deposition.
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