National Physical Laboratory

Near surface strain measurements on quartz wafers and devices.

Author(s):
Broughton, W R, Fry, A T, Mendels, D A, Chunnilall, C J
Source:
NPL Report MATC(MN)52, July 2003
ISSN:
1473-2742
ISBN:
NPL Doc. Ref:
PDB: 3498
Document Type:
NPL Report
DOI:

Note: An asterisk after an author's name indicates a non-NPL author.

Abstract:

No abstract available

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