Near surface strain measurements on quartz wafers and devices.
- Author(s):
- Broughton, W R, Fry, A T, Mendels, D A, Chunnilall, C J
- Source:
- NPL Report MATC(MN)52, July 2003
- ISSN:
- 1473-2742
- ISBN:
- NPL Doc. Ref:
- PDB: 3498
- Document Type:
- NPL Report
- DOI:
Note: An asterisk after an author's name indicates a non-NPL author.
Abstract:
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