National Physical Laboratory

First precise MEMS output measurement technique unveiled

NPL is involved in the European Metrology Research Programme project 'Metrology for Energy Harvesting' with six other national measurement institutes.

Confocal microscopy image of electrical testing in an electrostatic MEMS actuator
Confocal microscopy image of electrical testing in an
electrostatic MEMS actuator

One of the other partners, Laboratoire national de métrologie et d'essais (LNE), in France has recently developed a new way to accurately measure the power requirements and outputs of micro-electro-mechanical systems (MEMS) devices.

The technique will help manufacturers improve product performance, develop new functionalities, reduce energy consumption of mass production, respond to market demands for miniaturisation, and increase reliability of MEMS devices around the world.

NPL is holding a webinar on 'New capabilities to support industry through characterisation of MEMS-scale piezoelectric materials' on Wednesday 12 June. This will focus on the industrial measurement requirements for emerging PiezoMEMS technologies and the barriers faced by product developers in establishing online metrology for quality assurance in high volume commercial applications.

Register for the 'New capabilities to support industry through characterisation of MEMS-scale piezoelectric materials' webinar - 12.00 noon, Wednesday 12 June 2013.

More on EMRP project: Metrology for Energy Harvesting

Find out more about NPL's MEMS research

Last Updated: 18 Sep 2017
Created: 3 Jun 2013

Registration

Please note that the information will not be divulged to third parties, or used without your permission

Login