National Physical Laboratory

Class 10 and 1,000 Cleanroom Facilities - optical lithography, e-beam and thermal evaporation, wafer dicing saw and wire bonder

Class 10,000-cleanroom facilityClass 1,000-cleanroom facility 

Class 10 Cleanroom

  • Working to the spirit of ISO 5
  • Optical lithography suite – wet etching, spin coating, mask alignment facilities

  • Temperature and humidity control (20±1ºC, 45 %rh)

Class 1,000 Cleanroom

  • Working to the spirit of ISO 7.
  • Thermal evaporation, e-beam and thermal deposition systems

  • Temperature and humidity control (20±1ºC, 45 %rh)

  • Thin film coating, and some semiconductor packaging process

Contact

Customer Service tel: 020 8943 8681
E-mail: materials_enquiries@npl.co.uk

Last Updated: 26 Nov 2013
Created: 7 Jul 2010

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