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Micro Electro Mechanical Systems (MEMS)

MEMS measurement microphones

NPL is pursuing the development of MEMS (Micro Electro-Mechanical System)-based measurement microphones. Ultimately, these devices will be:

  • Deployable as arrays
  • Minimally perturbing
  • Robust and inherently stable
  • Used for multi-position, long-term monitoring
  • Easily deployable and autonomous – can be left measuring whilst unattended
  • Less vulnerable to theft
  • Multi-parameter sensing (pressure, intensity on 3-axes, others)
  • Able to report their positions
  • Simple to calibrate with potential for self calibration or internet calibration

Such devices have a large number of applications, including the following areas:

  • Environmental noise: measurement, map validation, map construction
  • Machinery noise: low-cost arrays, long-term monitoring
  • Noise exposure: personal dosimetry
  • Condition monitoring

For more information contact Richard Barham

Last Updated: 29 Mar 2012
Created: 29 May 2007